中文名称：三(二甲胺基)硅烷
  • 三(二甲氨基)硅烷
  • Tris(dimethylamino)silane
  • BRN 1901643; N,N,N',N',N'',N''-Hexamethylsilanetriamine; Silanetriamine, N,N,N',N',N'',N''-hexamethyl-; tris(dimethylamino)silyl
  • 15112-89-7
  • 239-165-0
  • C6H18N3Si
  • 160.3127
  • InChI=1/C6H18N3Si/c1-7(2)10(8(3)4)9(5)6/h1-6H3
  • 三(二甲胺基)硅烷 15112-89-7